
S y s t e m s
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Our systems
Advanced Vacuum is a world leading manufacturer of open load plasma etch and deposition tools (PECVD, PVD). Our systems are used in R&D, pilot production and production environments offering high reliability, excellent process performance and flexibility. For more information select the tool below! In addition to our own range of products, Advanced Vacuum also represent Applied MicroStructure which is a world leading manufacturer of equipment for molecular vapor deposition. Links to our partner Applied MicroStructure is found below.
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Vision 320 MKII RIEFlexible open load plasma etch system capable of etching a variety of films using either flurinated or chlorinated chemistry. Read more »
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Vision 310 MKII PECVDFlexible open load plasma deposition tool capabable of depositing films (SiO, SiN, SiC, a-Si) on a wide variety of substrates up to 12" in diameter.
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Locally GloballyWe support you globally through our partners and distributors.
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Vision latest newsletterRead the latest news about the Vision platform, development and upgrades.
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Advanced Vacuum is the distributor for Applied Microstructure in Scandinavia. AMST manufacturer molecular vapor deposition (MVD) systems. For more information please down load APMS latest broschure. Advanced Vacuum has trained service engineers that support the tools and make sure the systems are up and running.
Read more . . .
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Advanced Vacuum AB Järngatan 12 234 35 Lomma T +46 40 534070 F +46 40 411318 |
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