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  Our systems

 

Advanced Vacuum is a world leading manufacturer of open load plasma etch

and deposition tools (PECVD, PVD). Our systems are used in R&D, pilot production and production environments offering high reliability, excellent process performance and flexibility. For more information select the tool below!

In addition to our own range of products, Advanced Vacuum also represent Applied MicroStructure which is a world leading manufacturer of equipment for molecular vapor deposition. Links to our partner Applied MicroStructure is found below.                 

 

                                                                                             

     

         

                                             

       

 

           

                                                                    
                 
       

Vision 320 MKII RIE

Flexible open load plasma etch system capable of etching a 

variety of films using either flurinated or chlorinated chemistry.

 

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Vision 310 MKII PECVD

Flexible open load plasma deposition tool capabable of depositing films (SiO, SiN, SiC, a-Si) on a wide variety of substrates up to 12" in diameter.

 

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Locally Globally

We support you globally through our partners and distributors.

 

 

 

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Vision latest newsletter

Read the latest news about the Vision platform, development and upgrades. 

 

 

 

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   Applied Microstructure

 

Advanced Vacuum is the distributor for Applied Microstructure in Scandinavia. AMST manufacturer molecular vapor deposition (MVD) systems. For more information please down load APMS latest broschure. Advanced Vacuum has trained service engineers that support the tools and make sure the systems are up and running.

 

Read more . . . Please  visit Applied Microstructures homepage here . . .

 

 

    

Advanced Vacuum AB

Järngatan 12  

234 35 Lomma   

T +46 40 534070 

F +46 40 411318